摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing an optical waveguide component with a small propagation loss, and small polarization relativity and wavelength relativity of the propagation loss. <P>SOLUTION: In the method for manufacturing the optical waveguide component, the optical waveguide component forms a refractive index increasing area by collecting and irradiating a femto-second pulsed laser 3 to an inside of transparent material 9. The method is constituted that an average output of the femto-second pulsed laser 3 is adjusted so that peak power at a collecting point 7 of the femto-second pulsed laser 3 is a desired value, and is collected and irradiated to the inside of the transparent material 9. The peak power at the collecting point 7 of the femto-second pulsed laser 3 is, preferably, 6.9x10<SP>12</SP>W/cm<SP>2</SP>or less, more preferably, 8.7×10<SP>11</SP>W/cm<SP>2</SP>or less, and most preferably, 8.7×10<SP>8</SP>to 8.7×10<SP>11</SP>W/cm<SP>2</SP>. Moreover, the transparent material 9 is, preferably, a glass material which contains SiO<SB>2</SB>in major proportions, and is, more preferably, quartz glass. <P>COPYRIGHT: (C)2004,JPO</p> |