| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser marker for an Si wafer which can be constituted of a laser generator unit not having a high output without using an expensive SHG laser exhibiting a good absorbance to an Si wafer while reducing the cost and size. <P>SOLUTION: The laser marker comprises a YAG laser 1 irradiating laser light 2, a means 3 for condensing the laser light 2 to an Si wafer 4, a means 5 for scanning the condensing point of the laser light 2 on the Si wafer 4, and a mirror 6 for totally reflecting the laser light 7 transmitted the Si wafer 4 arranged sequentially. <P>COPYRIGHT: (C)2004,JPO</p> |
