PIEZOELECTRIC ACTUATOR AND ITS MANUFACTURING PROCESS, INK JET HEAD AND ITS MANUFACTURING PROCESS

摘要

PROBLEM TO BE SOLVED: To enhance the performance of a piezoelectric actuator by suppressing deformation even if a ceramic member having a piezoelectric driving section is bonded to a metallic member, and to provide an inkjet head in which ink ejection performance can be enhanced using such a piezoelectric actuator. SOLUTION: The piezoelectric actuator comprises a metallic member 2, and a ceramic member 1 having a piezoelectric driving section A bonded to the metallic members 2 and 13 wherein the stress value of the bonded ceramic member 1 measured by X-ray stress measurement is from +50 to -200 MPa. COPYRIGHT: (C)2004,JPO