| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate container for suppressing and preventing the structure of a mold from becoming complex, and preventing contamination on a substrate or a clean environment for processing the substrate against wear powder. <P>SOLUTION: A container body stores in array a plurality of substrates. A lid opens/closes an opening front surface of the container body. An internal pressure adjusting mechanism 30 is engaged with the container body and an installing part 10 of the lid, and adjusts the internal pressure of the container body which is closed with the lid. The internal pressure adjusting mechanism 30 comprises a fitting cylinder 31 which is elastic and formed into a near cylinder, a hollow filter holder 33 inserted in the axial direction of the fitting cylinder 31, and a plurality of filters 36 held inside the filter holder 33. The container body is provided with a fitting hole 11, and the fitting cylinder 31 of a simple configuration is deformed for attaching/detaching from the fitting hole 11. So no complex threaded hole is required. <P>COPYRIGHT: (C)2004,JPO |
