发明名称 FILM-FORMING METHOD, FILM-FORMING DEVICE, OPTICAL ELEMENT, ORGANIC ELECTROLUMINESCENT ELEMENT, SEMICONDUCTOR ELEMENT, AND ELECTRONIC EQUIPMENT
摘要 <p><P>PROBLEM TO BE SOLVED: To provide an film-forming method, film-forming device, optical element, organic electroluminescent element, semiconductor element, and electron equipment in which the shape of the film can be made in desired shape easily when the film is formed using a liquid material. <P>SOLUTION: A barrier rib 11 is provided on the treated face of the substrate 10, and a liquid material 15 is filled in the pattern region 20 surrounded by the barrier rib 11, and after filling, prescribed vibrations are applied to the substrate. <P>COPYRIGHT: (C)2004,JPO</p>
申请公布号 JP2004103496(A) 申请公布日期 2004.04.02
申请号 JP20020266692 申请日期 2002.09.12
申请人 SEIKO EPSON CORP 发明人 ASUKE SHINTARO
分类号 G02B5/20;B05C9/12;B05C11/10;B05D3/12;B05D7/00;H01L51/50;H05B33/10;H05B33/12;H05B33/14;H05B33/22;(IPC1-7):H05B33/10 主分类号 G02B5/20
代理机构 代理人
主权项
地址