| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro valve having a simple structure, especially having a simple wiring structure to a heater, and facilitating the manufacturing. SOLUTION: This micro valve is formed of a three-layer structure of a first base plate 2 formed with a micro passage in the lower side, a second base plate 3 formed with a movable part 12a of a diaphragm 12 approaching to/separating from a gate part 6 formed in an either part of the micro passage 5, and a heater 13, and having cavities 9 and 10 positioned in the lower parts of the movable part 12a of the diaphragm 12 and the heater 13 respectively, and a third base plate 4 closing the lower parts of the cavities 9 and 10. The pressure in the cavities 9 and 10 increases by the heating of the heater and then the movable part 12a of the diaphragm 12 upward moves and closely sticks to the gate part 13 to close the micro passage 5. COPYRIGHT: (C)2004,JPO
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