METAL PARTICLE-INCLUDING THIN FILM AND ITS FORMING PROCESS

摘要

PROBLEM TO BE SOLVED: To provide a metal particle-including thin film which includes metal particles having a uniform size and arranged almost with fixed intervals and its forming process. SOLUTION: The metal particle-including thin film comprises a mesoporous silica thin film with a thickness of≤1μm and a central pore diameter of 1-50nm and metal particles having an average particle size of 0.5-50nm and arranged separately with predetermined intervals within 3d-hexagonal or cubic pores of the mesoporous silica thin film. COPYRIGHT: (C)2004,JPO