| 摘要 |
PROBLEM TO BE SOLVED: To provide a device capable of easily and surely supplying a workpiece 20 into sealed space 1 under the environment different from open air or discharging the workpiece from the sealed space 1. SOLUTION: The device comprises a structure 3 placed on an inlet or outlet of the sealed space 1 and having a passage 4 to which the workpiece 20 is charged, a cylindrical rotator 5 positioned in the middle of the passage 4, installed sealingly and rotatably inside the structure 3, and having recessed grooves 9, into which the workpiece 20 is put, at two or more places on the circumference, and a driving means driving this rotator 5. In this device, the rotator 5 is rotated in a state where the workpiece 20 charged to the passage 4 is entered into the groove 9, so that the workpiece 20 is transferred and supplied into the sealed space 1 or discharged from the sealed space 1 while keeping hermeticity. COPYRIGHT: (C)2004,JPO
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