| 摘要 |
PROBLEM TO BE SOLVED: To surely provide electrodes in contact with a substrate, for example, without pressing the electrodes by a large force to the substrate held by a holding portion in the anode forming apparatus. SOLUTION: An aperture is provided at the bottom of an anode forming vessel 211, and an absorbing pad 251 is also arranged around the aperture. A negative electrode 201 is arranged at the upper part of a substrate 100 attracted by the absorbing pad 251, and a positive electrode 221 of a positive electrode structure body is pressed to the rear surface of the substrate 100. The positive electrode structure body 230 has a flexible contact security mechanism 230, and the positive electrode 221 is supported via the contact security mechanism 230. Accordingly, the positive electrode 221 is in contact with the rear surface of the substrate 100 on the entire surface of the contact surface as the front surface thereof by a small pressing force. COPYRIGHT: (C)2004,JPO
|
