| 摘要 |
PROBLEM TO BE SOLVED: To carry out transfer exposure which improves the contrast of a whole body and which is high in linewidth precision. SOLUTION: An electronic lens 209 is constituted of an exciting coil 209b and a U-shape magnetic pole 209a surrounding the exciting coil 209b. One side of lower part of the magnetic pole 209a surrounding the exciting coil 209b is formed of a member 209e made of beryllium or a beryllium alloy. The lower surface (opposing surface) 209d of the member 209e is positioned immediately above the electronic beam irradiation surface of a wafer and is opposed to the same. Since a backscattered electron scattering coefficient of beryllium is smaller compared with that of soft iron or the like, the re-reflecting rate of the electron reflected from the charged beam irradiation surface of the wafer to the opposing surface becomes low, thereby preventing fogging exposure due to a fogging effect. COPYRIGHT: (C)2004,JPO
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