| 摘要 |
PROBLEM TO BE SOLVED: To carry out cleaning of the vapor deposition mask efficiently and without deforming in the manufacture of an organic EL element. SOLUTION: The vapor deposition mask is scanned by focusing energy beam in the film forming chamber which carries out the vapor deposition of the organic EL element, and by carrying out local heating, the deposit accumulated on the vapor deposition mask is sublimated and removed. COPYRIGHT: (C)2004,JPO
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