| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultraviolet irradiating device which can prevent breakage of an excimer lamp 1 by supporting the lamp so as not to be subjected to a distortion while maintaining a rotational angular position in mounting the excimer lamp 1. SOLUTION: Two projected parts 7a, 7a of an attaching plate 7 are engaged with two recessed parts 5a, 5b of a base 5 attached to one end part in an axial direction of an excimer lamp 1 for radiating an ultraviolet ray so that the excimer lamp is supported, while at least rotation around an axis and additional movement to one end side in the axial direction are restricted. One projected part 8a of an attaching plate 8 is engaged with one circular recessed part 6a of a base 6 attached to the other end part in the axial direction of the excimer lamp 1 so that the excimer lamp can rotate around the axis, and is supported while additional movement to the other end side in the axial direction is restricted. COPYRIGHT: (C)2004,JPO
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