发明名称 MIXED-FLOW MANUFACTURING LINE SYSTEM AND MANUFACTURING METHOD USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a mixed-flow manufacturing line system which can reduce the work loads for reducing the number of treatment devices and retooling caused by the reduction in the number of the treatment devices. SOLUTION: In a treatment line part 10 for carrying out various treatment processes for manufacturing a color filter, carrying lines 21, 31, for example, as a prestage side carrying line join at the place marked as A1 and become a mixed-flow line 84. Then, the mixed-flow line 84 branches at the place marked as B1 and becomes carrying lines 22, 32 as a poststage side carrying line. Treatment devices 23, 24, 25 and treatment devices 33, 34, 35, which are the treatment devices in a rate limiting stage of slow treatment speed are disposed each on the carrying lines 22, 32 as the poststage side carrying line. A treatment device 85 whose treatment speed is relatively fast when compared with the treatment device in a rate limiting stage is disposed on the mixed-flow line 84. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004103947(A) 申请公布日期 2004.04.02
申请号 JP20020265791 申请日期 2002.09.11
申请人 DAINIPPON PRINTING CO LTD 发明人 WATANABE KAZUO
分类号 H01L21/677;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/677
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