METHOD OF MANUFACTURING SHADOW MASK ASSEMBLY, SHADOW MASK ASSEMBLY, AND VAPOR DEPOSITION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a large shadow mask achieving higher accuracy than accuracy achieving with a mask of one piece of full size in the whole region of a mask part array by dispersing the error of an individual mask part in the whole area of the mask assembly. SOLUTION: The method for manufacturing the shadow mask assembly contains such a step that (a) a plurality of shadow mask parts are manufactured; (b) the plurality of shadow mask parts are inspected to determine which shadow mask part is allowable; (c) the specified number of the allowable mask parts is arranged in the specified position to form the mask part array, and thereby, the error of the individual mask part is dispersed in the whole area of the mask part array, and (d) the individual mask part of the mask part array is joined with a supporting structure to form the shadow mask assembly. COPYRIGHT: (C)2004,JPO