| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser marking device for preventing deposition of small particles of 0.1 to 1μm generated in a laser marking step on a main surface of a glass substrate. <P>SOLUTION: The laser marking device comprises a laser beam oscillator 10 to output pulse-shaped laser beams, a deflecting means 12 which deflects the pulse-shaped laser beams and irradiates a work with the laser beams, and a loading table 15 movable in one axial direction or in two axial directions orthogonal to each other with the work 21 loaded thereon, and further comprises a local shielding means 14 to control the atmosphere of the surface of the work irradiated with laser beams when the the work is irradiated with the pulse-shaped laser beams. <P>COPYRIGHT: (C)2004,JPO</p> |
