| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a ceramic multilayer circuit having high density, small size, and high performance, and a manufacturing method thereof, which is capable of forming a fine line circuit on a ceramic green sheet and efficiently manufacturing the ceramic multilayer circuit thereof. <P>SOLUTION: A ceramic green sheet 3 is sandwiched with films 1, 2, and then a laser beam that is output-controlled is radiated from the side of one film 1 (an incident side film) to penetrate at least the incident side film 1 and the ceramic green sheet 3. A penetration region 1a on the incidents side film 1 and a penetration region 3a for a circuit on the green sheet 3 are formed. Thereafter, a circuit 5 having a predetermined pattern is formed by filling a conductor 4 (a conductive paste) into the penetration region 3a for the circuit formed on the ceramic green sheet 3, from the penetration region 1a formed on the incident side film 1. <P>COPYRIGHT: (C)2004,JPO</p> |
