ANODIC CHEMICAL CONVERSION APPARATUS AND METHOD, SUBSTRATE MANUFACTURING METHOD, AND SUBSTRATE TREATMENT DEVICE AND METHOD

摘要

PROBLEM TO BE SOLVED: To reliably and tightly attach an electrode to a back side of a substrate in a device for holding the back side of the substrate by a holding part and bringing the electrode into contact with the back side of the substrate to treat the substrate. SOLUTION: A circular recess 211a is formed in a bottom part of an anodic chemical conversion tank 211. A lower electrode 222 is disposed in the recess 211a, and a positive electrode 221 is fixed on the lower electrode 222. In other words, the positive electrode 221 is fixed to the anodic chemical conversion tank 211 via the lower electrode 222. An adsorption pad 251 is disposed around the recess 211a. An adsorption surface of the adsorption pad 251 and a contact surface of the positive electrode 221 are in the same plane. COPYRIGHT: (C)2004,JPO