TREATING LIQUID COATING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a treating liquid coating apparatus which can easily apply a pretreating liquid or a post-treating liquid onto a target to realize various treatments to be easily carried out to the target. SOLUTION: A pretreating liquid carriage 21 with a pretreating liquid delivery head 21a and a post-treating liquid carriage 22 with a post-treating liquid delivery head 22a are provided slidably on a guide shaft 18. A drive motor 20 transmits driving force selectively to a first drive pulley 12 or a second drive pulley 15. The first drive pulley 12 is transmitted through a first timing belt 14 to the pretreating liquid carriage 21 to move the pretreating liquid carriage 21. The second drive pulley 15 is transmitted through a second timing belt 17 to the post-treating liquid carriage 22 to move the post-treating liquid carriage 22. COPYRIGHT: (C)2004,JPO