| 摘要 |
PROBLEM TO BE SOLVED: To provide a chemical microdevice which is used for measuring the quantity of harmful gas such as NO<SB>X</SB>, SO<SB>X</SB>, CO<SB>X</SB>, and O<SB>3</SB>and which is easily manufactured and attains the cost reduction. SOLUTION: In the chemical microdevice, closed flow passages 11, 13, 14 for supplying test liquid are disposed on substrates 10, 20, and an opened reaction part 12 is disposed in the midst of the flow passage. In addition, a membrane filter 30 made of a resin is disposed so as to cover the opened reaction part. COPYRIGHT: (C)2004,JPO
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