| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a negative radiation-sensitive resin composition which can form a rectangular pattern with high resolution and has superior sensitivity, developing property, size faithfulness, etc. <P>SOLUTION: This negative radiation-sensitive resin composition contains (1) an alkali-soluble resin consisting of a resin (A) or (B), (2) a radiation-sensitive acid producing agent, (3) a bridging agent selected between an alkoxy methylated glycol uryl compound and an alkoxy methylated melamine compound, and (4) a basic compound. Here, the resin (A) is of 100 to 50 mol % in content of hydroxy styrene units, 5,000 to 100, 000 in polystyrene-converted weight mean molecular weight, and ≤1.3 in dispersion degree. Further, the resin (B) has hydroxy styrene units and (met)acrylate ester units. <P>COPYRIGHT: (C)2004,JPO |
