| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion attachment mass spectroscopy suitable for quantitative analysis capable of accurately measuring the concentration of the gas to be measured. SOLUTION: The ion attachment mass spectroscopy is a method of producing attached ions through a process in which metal ions bearing positive electric charges generated in a metal ion generation region 1 are attached to molecules of the gas to be measured in an attachment region 2 and then the mass spectrometric process is conducted for the attached ions in a mass spectroscopic region 3. Furthermore, the pressure in the attachment region is set so as to be included in the pressure range where free flight of the metal ions and the attached ions is possible in the attachment region, and an electrostatic field which decelerates the movement of metal ions is formed in the attachment region, and only the gas to be measured is introduced to the attachment region. COPYRIGHT: (C)2004,JPO
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