SCATTERING-TYPE NEAR-FIELD MICROSCOPE AND SCATTERING-TYPE NEAR-FIELD SPECTROSCOPIC SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a scattering-type near-field microscope and a scattering-type near-field spectroscopic system capable of improving an S/N ratio and contrast more than by conventional technology in the scattering-type near-field microscope and efficiently condensing a backscattering component in the case of sample measurement on a non-transmitting sample. SOLUTION: The scattering-type near-field microscope is constituted through the use of a self-detection-type cantilever. A metal or a dielectric for scattering evanescent light is provided only for the vicinity of a tipmost part of a probe provided for the cantilever. A part or the whole of the cantilever is constituted of an optically transparent material so that part or the whole of light backscattered at the tip of the probe and condensed by a condensing means may be transmitted through the cantilever and condensed. COPYRIGHT: (C)2004,JPO