IMAGE REGULATING APPARATUS AND IMAGE REGULATING METHOD OF X-RAY MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus for simply performing image regulation of an electronic imaging system in an X-ray microscope to perform photoelectric conversion of a transmitted image generated by allowing X-ray to be incident on a sample by a photoelectric conversion surface and imaging it by the electronic imaging system as an electron image. SOLUTION: A standard sample 2 is disposed at a sample position before a photoelectric conversion surface, and an electron generator 10 is disposed at the position in which the standard sample is irradiated with output beams. Image regulation of an electronic imaging system 4 is performed by using an electron image which is rapidly obtained in an imaging surface 5 by irradiating a large amount of electron beams 16 radiated from the electron generator 10 on the standard sample 2. COPYRIGHT: (C)2004,JPO