MICROPITCH MEASURING METHOD AND ITS APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a micropitch measuring method and its apparatus capable of highly accurately measuring a narrow pitch in a short time even on an optical disk of which the track pitch has a narrow pitch. SOLUTION: The optical disk 11 (sample) is mounted onto a sample moving means 21 in a vacuum chamber 20. The optical disk 11 is irradiated with an electron beam by an electron beam irradiating mechanism 30 as moving the optical disk 11 at a constant speed. Electrons from the optical disk 11 are detected by an electron detecting means 27. From both a signal of the detected electrons and the measured amount of movement of the optical disk 11, the track pitch is measured. The electron beam irradiating mechanism 30 is provided with a high-speed deflector 33 for measuring the track pitch by averaging the inside of deflected areas. COPYRIGHT: (C)2004,JPO