摘要 |
PROBLEM TO BE SOLVED: To stabilize and improve quality of a superconducting element. SOLUTION: The method of manufacturing superconducting elements comprises the processes of forming a first superconducting electrode 2 on a substrate 1, forming an insulation layer 3 on the first superconducting electrode 2 to expose a part of the first superconducting electrode 2, mechanically polishing the surface of the exposed part of the first superconducting electrode 2, forming a reformed part 4 by reforming the exposed part of the first superconducting electrode 2, and forming a second superconducting electrode 5 on the reformed part 4 and insulation layer 3. COPYRIGHT: (C)2004,JPO
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