发明名称 METHOD OF MANUFACTURING SUPERCONDUCTING ELEMENTS
摘要 PROBLEM TO BE SOLVED: To stabilize and improve quality of a superconducting element. SOLUTION: The method of manufacturing superconducting elements comprises the processes of forming a first superconducting electrode 2 on a substrate 1, forming an insulation layer 3 on the first superconducting electrode 2 to expose a part of the first superconducting electrode 2, mechanically polishing the surface of the exposed part of the first superconducting electrode 2, forming a reformed part 4 by reforming the exposed part of the first superconducting electrode 2, and forming a second superconducting electrode 5 on the reformed part 4 and insulation layer 3. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004103795(A) 申请公布日期 2004.04.02
申请号 JP20020263090 申请日期 2002.09.09
申请人 MITSUBISHI ELECTRIC CORP;INTERNATL SUPERCONDUCTIVITY TECHNOLOGY CENTER 发明人 WADA YUKIHIKO
分类号 H01L39/24;H01L39/22;(IPC1-7):H01L39/24 主分类号 H01L39/24
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