| 摘要 |
PROBLEM TO BE SOLVED: To prevent the stepped discontinuity of a metallic light shielding film and a metallic wire formed on a gap between electrodes of electric charge transferring electrodes and the wiring separation area of a peripheral part, and to prevent deterioration of light shielding characteristic or electric charge transfer characteristic in a solid state imaging device. SOLUTION: The electric charge transfer electrodes 222 of an imaging part and a peripheral electrode 230 of the peripheral part are formed by using a single-layer conductive electrode material film, and a thick insulating film 218 covering these electrodes is deposited to be planarized. With the thick insulating film 218 covering the peripheral electrode 230 as it is, the insulating film 218 covering the electric charge transfer electrodes 222 is etched to bury the insulating film 218 between the electric charge transfer electrodes 222, thereby satisfactory metallic wire 208 free from deterioration of smear characteristic is obtained. COPYRIGHT: (C)2004,JPO
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