SCATTERING-TYPE NEAR-FIELD MICROSCOPE AND SCATTERING-TYPE NEAR-FIELD SPECTROSCOPIC SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide technology capable of improving an S/N ratio and contrast more than conventional technology in a scattering-type near-field microscope and efficiently condensing a backscattering component in the case of sample measurement on a non-transmitting sample. SOLUTION: A metal or a dielectric for scattering an evanescent field is provided for only the vicinity of a tipmost part of a probe provide for a cantilever. A part or the whole of the cantilever is constituted of an optically transparent material so that part or the whole of light backscattered at the tip of the probe and condensed by a condensing means may be transmitted through the cantilever and condensed. COPYRIGHT: (C)2004,JPO