发明名称 STATIC ELECTRIFICATION TESTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a static electrification testing device that can test the relation between electric charges and electrostatic breakdowns, by intentionally electrostatically charging a device and controlling the electric charges. SOLUTION: This static electrification testing device is provided with a voltage source 8 for discharge as a first power source, a needle electrode 1 which is connected to the voltage source 8 to generate electrons 15 or ions of one polarity from its sharpened end section, and a ground plate 2 positioned below the sharpened end section of the electrode 1, separate from the section so that its main surface used for arranging the device 3 is set facing the sharp end section. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004101411(A) 申请公布日期 2004.04.02
申请号 JP20020265304 申请日期 2002.09.11
申请人 MITSUBISHI ELECTRIC CORP 发明人 KITABAYASHI HIROYOSHI;MUTO HIROTAKA;SHIODA HIRONORI
分类号 G01R31/26;G01R31/00;H01L21/66;(IPC1-7):G01R31/00 主分类号 G01R31/26
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