| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive single-crystal pulling apparatus which has a simple structure, performs imaging of meniscus by a common imaging means and, based on this, easily, accurately and automatically controls a diameter of a tail part. SOLUTION: In the single crystal pulling apparatus employing Czochralski method and in growing the tail part for reducing the diameter of a single crystal, an image of an arc shape of the meniscus is taken by an imaging means. Based on the arc shape image thus taken, an ellipse is calculated by an image-processing means; and the major axis of the ellipse is employed as the diameter of the tail part to control a crystal pulling means by a control means, thus growing the tail part. COPYRIGHT: (C)2004,JPO
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