| 摘要 |
PROBLEM TO BE SOLVED: To provide a transport robot that can prevent the damage of fingers without sacrificing work efficiency during maintenance work. SOLUTION: Regarding an arm 3 (31, 32, and 33), arranged to revolve, extend, and shrink freely, and to have a heat-resistant non-metal finger 332 for holding a wafer W at its head, a protective cover 4 designed to coat the finger 332, when the arm is in a shrunk position, is fitted to the revolving axis 2 of the arm 3, and the cover is installed at the location capable of avoiding interference with the arm 3, which extends or shrinks in the course of its operation. COPYRIGHT: (C)2004,JPO |
