ELECTROSTATIC ACTUATOR, LIQUID DROP EJECTING HEAD AND ITS MANUFACTURING PROCESS, INK CARTRIDGE, INKJET RECORDER, MICROPUMP, AND OPTICAL DEVICE

摘要

PROBLEM TO BE SOLVED: To solve a problem that characteristic variation is significant and reliability is insufficient. SOLUTION: Electrodes 24 are provided on a base substrate 21 while being divided by electrode dividing grooves 26 which are then filled with an insulating film 27 and flattened. Furthermore, a sacrifice layer is formed and after a diaphragm 22 is formed, the sacrifice layer is removed by etching to form a gap 23 thus constituting an actuator substrate 11. Surface of the actuator substrate 11 is formed flatly on the diaphragm 22 side. COPYRIGHT: (C)2004,JPO