| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface treatment method and a production method for a machine part by which surface treatment by plasma can securely be performed even in treatment in the case where the size of the objects to be treated is smaller than that of an ion sheath, and high productivity can be realized. SOLUTION: Substrates 1 are connected so as to be parallel to the faces 61 to be treated, and treatment is performed in a state where their length is made longer than that of an ion sheath, so that the thickness direction of the ion sheath is formed almost vertically to the desired faces 61 to be treated, and ions are accelerated almost vertically to the faces 61 to be treated. Thus, surface treatment in the parts can be secured, and, the plurality of substrates 1 are treated altogether as machine parts to improve productivity. COPYRIGHT: (C)2004,JPO
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