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发明名称
用以形成一矽薄膜于一玻璃基材表面之方法及设备
摘要
一绝缘层基材设备,制造本发明中所述之主动–矩阵液晶显示器。矽绝缘层上可包含待处理基材与复数与待处理基材键结之结晶矽供体部分。藉由多种供体基材,并于每一供体基材内形成分离层,结晶矽供体部分可与待处理基材键结。供体基材可跨越待处理基材表面加以配置,并与待处理基材产生键结。供体基材之后可于个别分离层处断裂,并自待处理基材移除,但每一供体基材之供体部分则仍黏附于待处理基材。
申请公布号
TW200405410
申请公布日期
2004.04.01
申请号
TW092125279
申请日期
2003.09.12
申请人
应用材料股份有限公司
发明人
罗伯特贝许雷许;肯罗
分类号
H01L21/00
主分类号
H01L21/00
代理机构
代理人
蔡坤财
主权项
地址
美国
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