ELECTRONIC DEVICE INCLUDING MULTIPLE CAPACITANCE VALUE MEMS CAPACITOR AND ASSOCIATED METHODS

摘要

An electronic device, such as a filter of phase shifter, for example, includes a substrate, and a MEMS capacitor on the substrate and having a plurality of selectable capacitance values. The MEMS capacitor includes a lower capacitor electrode on the substrate, and a movable bridge comprising end portions connected to the substrate laterally adjacent the lower capacitor electrode. The movable bridge may also include a conductive medial portion between the end portions defining an upper capacitor electrode suspended above the lower capacitor electrode and being movable between an upper position and a lower position by an electrostatic force generated between the capacitor electrodes. Moreover, the movable bridge may further include at least one trovel limiting portion between the end portions for engaging adjacent sustrate portions to keep the upper capacitor electrode in a predetermined spaced relation from the lower capacitor electrode when in the lower position.