发明名称 |
Apparatus for measuring temperatures of a wafer using specular reflection spectroscopy |
摘要 |
An apparatus (295) using specular reflection spectroscopy to measure a temperature of a substrate (135). By reflecting light (100) from a substrate, the temperature of the substrate can be determined using the band-edge characteristics of the substrate. This in situ apparatus can be used as a feedback control in combination with a variable temperature substrate holder to more accurately control the processing conditions of the substrate. By utilizing a multiplicity of measurement sites, the variation of the temperature across the substrate can also be measured.
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申请公布号 |
US2004061057(A1) |
申请公布日期 |
2004.04.01 |
申请号 |
US20030398652 |
申请日期 |
2003.08.29 |
申请人 |
JOHNSON SHANE R.;ZHANG YONG-HANG;JOHNSON WAYNE L. |
发明人 |
JOHNSON SHANE R.;ZHANG YONG-HANG;JOHNSON WAYNE L. |
分类号 |
G01K11/00;G01K11/12;(IPC1-7):G01N21/55 |
主分类号 |
G01K11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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