Variable optical attenuator

摘要

A variable optical attenuator has a first movable waveguide support and a second waveguide support that include first and second waveguides, respectively, such that the first and second waveguides are aligned for propagating an optical energy. An electrically driven actuator positions the movable waveguide support for coupled, optical misalignment relative to the second support to achieve a desired optical attenuation value. The movable waveguide support may be in a cantilevered configuration in which a distal end extends over a surface having an electrode. In this example, applying a drive signal to the electrode deflects the movable support such that the signal coupled between the first waveguide to the second waveguide is attenuated. The drive signal may be set to achieve a desired value for an electrical parameter that varies with the position of the movable waveguide support. In some examples, the drive signal is set to achieve a desired capacitance or voltage difference between the movable waveguide support and the electrode.