ALUMINUM NITRIDE SINTERED COMPACT

摘要

An aluminum nitride sintered compact comprises grains having an average grain diameter (D50) of 0.1 to 2.5 mum, has a pore area ratio of 1 X 10<-7> or less, has a pore density of 0.05 pieces/mm<2> or less with respect to pores having a diameter of 1 mum or more, and a Vickers hardness in the range of 14 to 17 GPa. The aluminum nitride sintered compact is comprised of grains having a relatively small diameter and has a markedly low pore density, and thus is excellent in strength characteristics and in the capability of being formed into a mirror surface and is useful, in particular, as a material for a circuit board having a surface on which a fine wiring pattern is formed.