| 摘要 |
<p>A substrate supporting apparatus has a supporting member (10), which supports a substrate from below at three or more points (supporting points). The supporting member comprises a pillar (11) extending in the direction of height, a crossbar (13), which horizontally extends from the end of the pillar, and a rubber ring (15) fitted on the crossbar. By vertically arranging the rubber ring (15), the outer surface of the rubber ring is of a convex shape, thereby coming into contact with the substrate at a single point, the uppermost point of the rubber ring. Consequently, no space is formed between the substrate and the rubber ring and thus, no suction-cup phenomenon occurs. Therefore, neither vibration nor positional deviation occurs when the substrate is dismounted.</p> |
