| 摘要 |
PURPOSE: A field emission device and a fabrication method therefore are provided to maintain easily a high vacuum and to prevent a damage of an electrode due to a spacer. CONSTITUTION: A field emission device comprises a cathode having a field emission structure, a metal bumper(50) arranged at a top part of the cathode, and a spacer(30) arranged on a top part of the metal bumper and supporting a vacuum territory between the cathode and an anode(20). A field emission device fabrication method comprises a step of forming a base electrode(2), a field insulating film(3), and a tunneling insulating film(4) at a top part of a base glass plate(1), a step of forming a top part electrode pad(5) and a top part electrode bus(6) at a top part of the former structure, a step of forming an over row insulating film(7) at a top part of the former structure, a step of forming an metal seed layer(9) at a top part of the over row insulating film, a step of forming the bumper by coating a metal on the metal seed layer, a step of forming a top electrode(8) on the tunneling insulating film after exposing the tunneling insulating film by etching a partial of the electrode pad, and a step of equipping the spacer on a top part of the bumper and packaging with the anode.
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