SEMI-CONDUCTOR COMPONENT WITH CONDENSATORS BURIED IN THE SUBSTRATE AND INSULATED COMPONENT LAYER THEREOF
摘要
The invention relates to a semi-conductor substrate and a semi-conductor circuit embodied therein and a production method associated therewith. A plurality of cavities (P) provided with a respective dielectric layer (D) and a capacitor-electrode (E2) are embodied in order to produce capacitors buried in a carrier substrate and an actual semi-conductor component layer (3) is insulated from the carrier substrate (1) by an insulation layer (2).
申请公布号
WO2004027861(A1)
申请公布日期
2004.04.01
申请号
WO2003DE03044
申请日期
2003.09.13
申请人
INFINEON TECHNOLOGIES AG;HOFMANN, FRANZ;LEHMANN, VOLKER;RISCH, LOTHAR;ROESNER, WOLFGANG;SPECHT, MICHAEL
发明人
HOFMANN, FRANZ;LEHMANN, VOLKER;RISCH, LOTHAR;ROESNER, WOLFGANG;SPECHT, MICHAEL