发明名称 METHOD FOR TRANSFERRING ELEMENTS BETWEEN SUBSTRATES
摘要 The invention concerns a method for transferring at least an element from a donor substrate to a target substrate (40). The invention is characterized in that it consists in securing the element to a handle-substrate via a bonding layer (32) capable of degradation and in producing a degradation of the bonding layer during a step which consists in releasing the element to be transferred. The invention is applicable to the transfer of components.
申请公布号 WO03081664(A3) 申请公布日期 2004.04.01
申请号 WO2003FR00905 申请日期 2003.03.21
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE;ASPAR, BERNARD;RAYSSAC, OLIVIER;FOURNEL, FRANCK 发明人 ASPAR, BERNARD;RAYSSAC, OLIVIER;FOURNEL, FRANCK
分类号 H01L21/67;H01L21/68;H01L21/762 主分类号 H01L21/67
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