Coating device for coating a large substrate or a number of smaller substrates is arranged within a vacuum chamber and has a moving unit to which a vaporizer is fixed

摘要

Coating device is arranged within a vacuum chamber (1) and has a moving unit (7) to which a vaporizer is fixed. The moving unit has a programmable control by which the moving unit is able to move the vaporizer toward the surface (4) of the substrate (3) to be coated. Vaporizer screens (8, 9) and a measuring unit (10) are connected to the vaporizer in a static manner.