| 摘要 |
A two-axis MEMS device for an optical switch may be fabricated using a single wafer. The device has a movable mirror rotatably coupled to a plate, which is itself rotatably coupled to a stationary substrate to enable mirror rotation about two axes. The mirror rotates with respect to the plate in response to a first voltage applied between the mirror and a movable electrode rigidly connected to the plate. The plate rotates with respect to the substrate in response to a second voltage applied between the plate and a stationary electrode rigidly connected to the substrate. Additional movable and/or stationary electrodes may be implemented to enable bidirectional rotation of the plate and/or the mirror. A spring supporting the plate on the substrate may have two or more split parts to provide two or more independent voltages from the substrate. The electrodes may be arranged with respect to each other and/or the mirror to form a fringe-field (FF) actuator, which may alleviate any snap-down problem. Multiple devices of the invention may be arrayed in a single integrated structure to form a linear, radial, or two-dimensional array of mirrors.
|
