发明名称 |
METHOD OF PRODUCING TANTALUM AND NIOBIUM ALKOXIDES |
摘要 |
The invention relates to a method of producing niobium (V) and tantalum (V) alkoxides, especially niobium (V) and tantalum (V) ethoxide by reacting NbCl>5< OR TACL>5< with a corresponding alcohol in the presence of ammonium. The NbCl>5< OR TACL>5< is dissolved in alcohol at a temperature of 0 DEG C to -50 DEG C, said alcohol containing 5 to 7 mole ammonium per mole NbCl>5< OR TACL>5< to be reacted. |
申请公布号 |
WO02074473(A3) |
申请公布日期 |
2004.04.01 |
申请号 |
WO2002EP02428 |
申请日期 |
2002.03.06 |
申请人 |
H.C. STARCK GMBH;ZELL, FRIEDRICH |
发明人 |
ZELL, FRIEDRICH |
分类号 |
C07F9/00;C07C29/70;C23C16/18;C23C16/34;C23C16/40;H01L21/285 |
主分类号 |
C07F9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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