发明名称 METHOD OF PRODUCING TANTALUM AND NIOBIUM ALKOXIDES
摘要 The invention relates to a method of producing niobium (V) and tantalum (V) alkoxides, especially niobium (V) and tantalum (V) ethoxide by reacting NbCl>5< OR TACL>5< with a corresponding alcohol in the presence of ammonium. The NbCl>5< OR TACL>5< is dissolved in alcohol at a temperature of 0 DEG C to -50 DEG C, said alcohol containing 5 to 7 mole ammonium per mole NbCl>5< OR TACL>5< to be reacted.
申请公布号 WO02074473(A3) 申请公布日期 2004.04.01
申请号 WO2002EP02428 申请日期 2002.03.06
申请人 H.C. STARCK GMBH;ZELL, FRIEDRICH 发明人 ZELL, FRIEDRICH
分类号 C07F9/00;C07C29/70;C23C16/18;C23C16/34;C23C16/40;H01L21/285 主分类号 C07F9/00
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