发明名称 |
ELECTRON BEAM IRRADIATION DEVICE, ELECTRON BEAM IRRADIATION METHOD, DISC-LIKE BODY MANUFACTURING APPARATUS, AND DISC-LIKE BODY MANUFACTURING METHOD |
摘要 |
An electron beam irradiation device and method for readily curing a surface layer of a material hard to cure by ultraviolet irradiation and/or at least part of a resin layer such as a light-transmitting layer under the surface layer. A disc-like body manufacturing apparatus and method for manufacturing a disc-like body on which efficiently formed are a surface layer of a material hard to cure by ultraviolet irradiation and/or at least part of a resin layer such as a light-transmitting layer under the surface layer. The electron beam irradiation device (1) comprises a rotation drive section (17) for rotating a body (2) to be rotated, a shielded container (10) for containing the body rotatably, and an electron beam irradiation section (11) provided in the shielded container and adapted to irradiate an electron beam onto the surface of the body through an irradiation window (11a) while rotating the body. Thus, an electron beam having an energy greater than ultraviolet radiation is irradiated onto the surface of the rotating body efficiently. |
申请公布号 |
WO2004027520(A1) |
申请公布日期 |
2004.04.01 |
申请号 |
WO2003JP11890 |
申请日期 |
2003.09.18 |
申请人 |
TDK CORPORATION;USAMI, MAMORU;TANAKA, KAZUSHI;YONEYAMA, KENJI;KANEKO, YUKIO;UMEGA, TAKESHI |
发明人 |
USAMI, MAMORU;TANAKA, KAZUSHI;YONEYAMA, KENJI;KANEKO, YUKIO;UMEGA, TAKESHI |
分类号 |
G03F7/20;G11B7/26;G21K5/04 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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