| 摘要 |
<p>A proper incident condition at each pixel is obtained according to the distance between an optical system and a sensor light receiving unit, and a light receiving efficiency at each pixel is improved and sensitivity is made uniform. Since a main ray of light a is shone at an incident angle theta at a pixel at the periphery of a screen, the positional relations among a micro-lens (260), a color filter (250), wirings (220, 230, 240), a photodiode (110) or the like are such that they are disposed along an incident direction in conformity with this incident angle theta. The incident angle theta used is determined in consideration of the distance from the micro-lens (260) to the surface of a silicon substrate (100) and the depth position of the photoelectric conversion unit of the photodiode (110) from the surface of the silicon substrate (100). The photoelectric conversion unit (n-type region) of the photodiode (110) is formed to be slanted corresponding to an incident angle theta at a pixel at the periphery of a screen.</p> |
