发明名称 |
FAST GAS EXCHANGE FOR THERMAL CONDUCTIVITY MODULATION |
摘要 |
A method for thermally processing a semiconductor substrate (12) comprises: heating the substrate to a target peak temperature while controlling the gas pressure in the processing chamber (14) at a pressure level that is significantly lower than atmospheric pressure; providing a flow of a purge gas between the substrate and a thermal reservoir (22, 23) at or near the time the substrate temperature reaches the target peak temperature while adjusting the gas pressure in the processing chamber to a second pressure level. Preferably, the purge gas has a relatively high thermal conductivity. |
申请公布号 |
WO2004027838(A2) |
申请公布日期 |
2004.04.01 |
申请号 |
WO2003US28510 |
申请日期 |
2003.09.09 |
申请人 |
APPLIED MATERIALS, INC.;RANISH, JOSEPH;JENNINGS, DEAN;HAAS, BRIAN |
发明人 |
RANISH, JOSEPH;JENNINGS, DEAN;HAAS, BRIAN |
分类号 |
C23C16/44;C23C16/48;F27B17/00;F27D19/00;F27D21/00;H01L21/00;H01L21/324 |
主分类号 |
C23C16/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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