发明名称 |
Orientation stabilization for MEMS devices |
摘要 |
A control circuit designed to control driving voltages applied to the actuating electrodes of a MEMS mirror. The control circuit is interfaced with a mirror position sensor and includes a variable gain amplifier whose output depends on a desired mirror equilibrium angle and a current mirror tilt angle determined by the sensor. The desired equilibrium angle can be changed by varying a reference signal applied to the amplifier. The control circuit can stabilize the mirror at relatively large tilt angles and, as a result, extend the available angular range beyond the snap-down angle. Since the number of MEMS mirrors that can be arrayed in an optical cross-connect is a function of the available angular range, the number of channels in a cross-connect may be substantially increased.
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申请公布号 |
US2004061925(A1) |
申请公布日期 |
2004.04.01 |
申请号 |
US20020261167 |
申请日期 |
2002.09.30 |
申请人 |
AZAROV ALEXEI V.;GILES RANDY C.;WEINGARTNER WENDELIN |
发明人 |
AZAROV ALEXEI V.;GILES RANDY C.;WEINGARTNER WENDELIN |
分类号 |
G02B26/08;(IPC1-7):G02B26/00 |
主分类号 |
G02B26/08 |
代理机构 |
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主权项 |
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地址 |
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