发明名称 |
Semiconductor handler interface auto alignment |
摘要 |
A test cell for use in a semiconductor manufacturing operation allowing alignment of semiconductor devices to be tested to a test station. The test cell is well suited for testing semiconductor devices on carrier strips. To aid in alignment, the test cell includes a down-ward looking camera and a simple upward looking sensor. Fiducials are acurately positioned relative to the test site, which are easily detected by the simple sensor. A controller within the test cell uses the output of the camera and the sensor, in conjunction with position sensors on a robotic assembly, to determine relative positions of the devices to be tested and the test station and issue the appropriate commands to align the devices to the test station.
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申请公布号 |
US2004062104(A1) |
申请公布日期 |
2004.04.01 |
申请号 |
US20020261005 |
申请日期 |
2002.09.30 |
申请人 |
MULLER LUIS A.;MOORE JOHN D.;SVENDSEN ERIK C. |
发明人 |
MULLER LUIS A.;MOORE JOHN D.;SVENDSEN ERIK C. |
分类号 |
G01R31/319;(IPC1-7):G11C29/00 |
主分类号 |
G01R31/319 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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