发明名称 Semiconductor handler interface auto alignment
摘要 A test cell for use in a semiconductor manufacturing operation allowing alignment of semiconductor devices to be tested to a test station. The test cell is well suited for testing semiconductor devices on carrier strips. To aid in alignment, the test cell includes a down-ward looking camera and a simple upward looking sensor. Fiducials are acurately positioned relative to the test site, which are easily detected by the simple sensor. A controller within the test cell uses the output of the camera and the sensor, in conjunction with position sensors on a robotic assembly, to determine relative positions of the devices to be tested and the test station and issue the appropriate commands to align the devices to the test station.
申请公布号 US2004062104(A1) 申请公布日期 2004.04.01
申请号 US20020261005 申请日期 2002.09.30
申请人 MULLER LUIS A.;MOORE JOHN D.;SVENDSEN ERIK C. 发明人 MULLER LUIS A.;MOORE JOHN D.;SVENDSEN ERIK C.
分类号 G01R31/319;(IPC1-7):G11C29/00 主分类号 G01R31/319
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