METHOD FOR FABRICATING TEST SAMPLE USED IN TRANSMISSION ELECTRON MICROSCOPE ANALYSIS

摘要

PURPOSE: A method for fabricating a test sample used in a transmission electron microscope analysis is provided to prevent patterns from being damaged during the test sample fabricating process. CONSTITUTION: First adhesive material(150a) is coated on a first thin film(110) formed with a first pattern(112) so that the first adhesive material(150a) is filled between the first patterns(112). First adhesive material is also coated on a second thin film(120) formed with a second pattern(122) so that the first adhesive material(150a) is filled between the second patterns(122). Second adhesive material(150b) is coated on the first pattern(112), in which the first adhesive material(150a) is coated. Second adhesive material(150b) is also coated on the second pattern(122). Then, the first thin film(110) is bonded to the second film(120).